Shutdown fusion SNF 2009-12-02 16:00:27: Fusion Shut Down

yspark at snf.stanford.edu yspark at snf.stanford.edu
Wed Dec 2 16:00:28 PST 2009


While running dummy wafer at the beginning, the process has been stopped and the dummy wafer is still inside.  There was funny sound at the deck while moving the metal cassette.




More information about the fusion-pcs mailing list