From gsosa at snf.stanford.edu Thu Feb 5 09:08:03 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Feb 2009 09:08:03 -0800 Subject: Problem fusion SNF 2008-11-30 12:39:28: Memory lost Message-ID: Replaced CPU battery as per Fusion troubleshooting guide. Re-teach all wafer handling pick and place positions. Repaired chuck vacuum leak at solinoid and sensor fittings. Still wafer handling issues at sender and reciever. Removed indexers from system. Cleaned old lubricant from elevator lead screws and guideways. Relubed leadscrews and guideways. Re-installed indexers and cycled 50 wafers through system with no problems. System is ready for testing/usage. System only has default recipe loaded. Also did hotplate temperature measurements at various setpoints . Will continue to monitor system and exercise wafer handling. From gsosa at snf.stanford.edu Thu Feb 5 09:08:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Feb 2009 09:08:13 -0800 Subject: Shutdown fusion SNF 2008-12-01 08:47:58: system configuration data lost Message-ID: Replaced CPU battery as per Fusion troubleshooting guide. Re-teach all wafer handling pick and place positions. Repaired chuck vacuum leak at solinoid and sensor fittings. Still wafer handling issues at sender and reciever. Removed indexers from system. Cleaned old lubricant from elevator lead screws and guideways. Relubed leadscrews and guideways. Re-installed indexers and cycled 50 wafers through system with no problems. System is ready for testing/usage. System only has default recipe loaded. Also did hotplate temperature measurements at various setpoints . Will continue to monitor system and exercise wafer handling. From gsosa at snf.stanford.edu Thu Feb 5 09:08:22 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Feb 2009 09:08:22 -0800 Subject: Comment fusion SNF 2008-12-03 14:38:14: Update 12/3 Message-ID: Replaced CPU battery as per Fusion troubleshooting guide. Re-teach all wafer handling pick and place positions. Repaired chuck vacuum leak at solinoid and sensor fittings. Still wafer handling issues at sender and reciever. Removed indexers from system. Cleaned old lubricant from elevator lead screws and guideways. Relubed leadscrews and guideways. Re-installed indexers and cycled 50 wafers through system with no problems. System is ready for testing/usage. System only has default recipe loaded. Also did hotplate temperature measurements at various setpoints . Will continue to monitor system and exercise wafer handling.