Problem fusion SNF 2008-11-30 12:39:28: Memory lost

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Feb 5 09:08:03 PST 2009


Replaced CPU battery as per Fusion troubleshooting guide. Re-teach all wafer handling pick and place positions. Repaired chuck vacuum leak at solinoid and sensor fittings. Still wafer handling issues at sender and reciever. Removed indexers from system. Cleaned old lubricant from elevator lead screws and guideways. Relubed leadscrews and guideways. Re-installed indexers and cycled 50 wafers through system with no problems. System is ready for testing/usage. System only has default recipe loaded. Also did hotplate temperature measurements at various setpoints . Will continue to monitor system and exercise wafer handling.




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