From lwchang at snf.stanford.edu  Wed Jul 15 22:45:32 2009
From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu)
Date: Wed, 15 Jul 2009 22:45:32 -0700
Subject: Problem fusion SNF 2009-07-15 22:45:32: output cassette is not well calibrated
Message-ID: <mailman.77.1356281712.3840.fusion-pcs@snf.stanford.edu>

sometimes the processed wafer would just not stay in the output cassette because the slot position was wrong. It even dropped my wafers.



From gsosa at snf.stanford.edu  Tue Jul 21 14:33:34 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 21 Jul 2009 14:33:34 -0700
Subject: Problem fusion SNF 2009-07-15 22:45:32: output cassette is not well calibrated
Message-ID: <mailman.78.1356281712.3840.fusion-pcs@snf.stanford.edu>

Removed the output indexer. Cleaned off grease from leadscrew. Re-lubricated with spray on lubricant. Cycled many wafers through. System tested OK.