From gsosa at snf.stanford.edu  Wed Aug 18 15:34:15 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 18 Aug 2010 15:34:15 -0700
Subject: Shutdown fusion SNF 2010-08-18 15:34:14: Maint. Testing
Message-ID: <mailman.82.1356281712.3840.fusion-pcs@snf.stanford.edu>

Testing wafer handling and doing hotplate temperature profile. Cycled 75 wafers through the system with handling program. No wafer handling errors.



From gsosa at snf.stanford.edu  Thu Aug 19 15:23:28 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 19 Aug 2010 15:23:28 -0700
Subject: Comment fusion SNF 2010-08-19 15:23:27: Testing
Message-ID: <mailman.83.1356281712.3840.fusion-pcs@snf.stanford.edu>

Cycled another 75 wafers with no problem. 1 more temperature profiles.



From gsosa at snf.stanford.edu  Fri Aug 20 15:04:24 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 20 Aug 2010 15:04:24 -0700
Subject: Comment fusion SNF 2010-08-20 15:04:24: Testing Continues
Message-ID: <mailman.84.1356281712.3840.fusion-pcs@snf.stanford.edu>

Cycled 100 wafers through system with no handling errors.