From gsosa at snf.stanford.edu  Fri Jan  8 14:18:05 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 8 Jan 2010 14:18:05 -0800
Subject: Shutdown fusion SNF 2009-12-02 16:00:27: Fusion Shut Down
Message-ID: <mailman.80.1356281712.3840.fusion-pcs@snf.stanford.edu>

Cleaned and lubed the recieve indexer lead screw assembly. Installed indexer and aligner indexer to robot transfer arm. Cycled 100 wafers with transfer program "M".  No wafer handling issues. Cycled 1 wafer with standard program "A" to verify system and magnetron operation. All OK.