Shutdown fusion SNF 2009-12-02 16:00:27: Fusion Shut Down

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 8 14:18:05 PST 2010


Cleaned and lubed the recieve indexer lead screw assembly. Installed indexer and aligner indexer to robot transfer arm. Cycled 100 wafers with transfer program "M".  No wafer handling issues. Cycled 1 wafer with standard program "A" to verify system and magnetron operation. All OK.




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