From gsosa at snf.stanford.edu  Mon May  9 14:12:24 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 9 May 2011 14:12:24 -0700
Subject: Shutdown fusion SNF 2010-08-18 15:34:14: Maint. Testing
Message-ID: <mailman.86.1356281712.3840.fusion-pcs@snf.stanford.edu>

Re-assembled the system. Turned on water and checked for leaks. Powered up system and initialized- All OK. Cycled wafers through system with standard process "A". All OK, Lamps OK, handling OK.



From gsosa at snf.stanford.edu  Mon May  9 14:12:30 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 9 May 2011 14:12:30 -0700
Subject: Problem fusion SNF 2011-01-23 18:54:50: water shut off
Message-ID: <mailman.87.1356281712.3840.fusion-pcs@snf.stanford.edu>

Re-assembled the system. Turned on water and checked for leaks. Powered up system and initialized- All OK. Cycled wafers through system with standard process "A". All OK, Lamps OK, handling OK.