Problem fusion SNF 2011-01-23 18:54:50: water shut off

gsosa at gsosa at
Mon May 9 14:12:30 PDT 2011

Re-assembled the system. Turned on water and checked for leaks. Powered up system and initialized- All OK. Cycled wafers through system with standard process "A". All OK, Lamps OK, handling OK.

More information about the fusion-pcs mailing list