Problem fusion SNF 2011-01-23 18:54:50: water shut off

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 9 14:12:30 PDT 2011


Re-assembled the system. Turned on water and checked for leaks. Powered up system and initialized- All OK. Cycled wafers through system with standard process "A". All OK, Lamps OK, handling OK.




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