From gsosa at snf.stanford.edu  Wed Feb 29 10:01:26 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 29 Feb 2012 10:01:26 -0800
Subject: Shutdown fusion SNF 2011-12-14 08:21:28: shutdown
Message-ID: <mailman.92.1356281712.3840.fusion-pcs@snf.stanford.edu>

Powered up and reset the system. Ran 6 wafers with process  "A". Lamps, heaters and wafer handling checked out OK.



From gsosa at snf.stanford.edu  Wed Feb 29 10:01:33 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 29 Feb 2012 10:01:33 -0800
Subject: Problem fusion SNF 2011-12-11 18:26:30: Startup problems
Message-ID: <mailman.93.1356281712.3840.fusion-pcs@snf.stanford.edu>

Powered up and reset the system. Ran 6 wafers with process  "A". Lamps, heaters and wafer handling checked out OK.