From emyers at snf.stanford.edu  Fri Aug 13 09:41:55 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 13 Aug 2004 09:41:55 -0700
Subject: Shutdown gasonics 2002-01-07 08:25:32: NOT ready yet
Message-ID: <mailman.10.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Ready to continue testing including coral



From emyers at snf.stanford.edu  Fri Aug 13 09:43:09 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 13 Aug 2004 09:43:09 -0700
Subject: Shutdown gasonics SNF 2004-08-13 09:43:09: Stil In Testing
Message-ID: <mailman.11.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Recipes and procedure writen.  Still requires some testing



From emyers at snf.stanford.edu  Mon Aug 23 15:39:46 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 23 Aug 2004 15:39:46 -0700
Subject: Shutdown gasonics SNF 2004-08-13 09:43:09: Stil In Testing
Message-ID: <mailman.12.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Turn On Date: 8/23/04



From amyers at snf.stanford.edu  Tue Aug 24 10:47:59 2004
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Tue, 24 Aug 2004 10:47:59 -0700
Subject: Shutdown gasonics SNF 2004-08-24 10:47:59: lamp 2 failure
Message-ID: <mailman.13.1356281729.3883.gasonics-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Wed Aug 25 08:11:26 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 25 Aug 2004 08:11:26 -0700
Subject: Shutdown gasonics SNF 2004-08-24 10:47:59: lamp 2 failure
Message-ID: <mailman.14.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Lamp 2 failure in Hibernation mode.  Process still runs.  Need to look in to cause of erro message.



From emyers at snf.stanford.edu  Wed Aug 25 08:12:52 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 25 Aug 2004 08:12:52 -0700
Subject: Problem gasonics SNF 2004-08-25 08:12:52: Lamp 2 Failure
Message-ID: <mailman.15.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Lamp 2 failure occurs during Hibernation.  Recipes still can be ran.  Will look into cause of error message.



From cbaxter at snf.stanford.edu  Wed Aug 25 16:30:09 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 25 Aug 2004 16:30:09 -0700
Subject: Problem gasonics SNF 2004-08-25 08:12:52: Lamp 2 Failure
Message-ID: <mailman.16.1356281729.3883.gasonics-pcs@snf.stanford.edu>

glitch on the system. all three lamps are ok



From emyers at snf.stanford.edu  Mon Aug 30 10:02:12 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 30 Aug 2004 10:02:12 -0700
Subject: Shutdown gasonics SNF 2004-08-30 10:02:10: Wafer Handling
Message-ID: <mailman.17.1356281729.3883.gasonics-pcs@snf.stanford.edu>

The load side is not recognizing wafers.



From eenriquez at snf.stanford.edu  Tue Aug 31 09:09:19 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 31 Aug 2004 09:09:19 -0700
Subject: Shutdown gasonics SNF 2004-08-30 10:02:10: Wafer Handling
Message-ID: <mailman.18.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Adjusted the load wafer vacuum sensor.



From emyers at snf.stanford.edu  Tue Aug 31 15:45:28 2004
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 31 Aug 2004 15:45:28 -0700
Subject: Shutdown gasonics SNF 2004-08-31 15:45:27: Shutdown
Message-ID: <mailman.19.1356281729.3883.gasonics-pcs@snf.stanford.edu>

Can not get it to recove logic state.