Shutdown gasonics SNF 2004-08-30 10:02:10: Wafer Handling
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Mon Aug 30 10:02:12 PDT 2004
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Problem gasonics SNF 2004-08-25 08:12:52: Lamp 2 Failure
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Shutdown gasonics SNF 2004-08-30 10:02:10: Wafer Handling
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The load side is not recognizing wafers.
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Problem gasonics SNF 2004-08-25 08:12:52: Lamp 2 Failure
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Shutdown gasonics SNF 2004-08-30 10:02:10: Wafer Handling
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