From joshchi at snf.stanford.edu Wed Dec 1 17:33:57 2004 From: joshchi at snf.stanford.edu (joshchi at snf.stanford.edu) Date: Wed, 1 Dec 2004 17:33:57 -0800 Subject: Problem gasonics SNF 2004-12-01 17:33:56: output cassete does not lower down Message-ID: even after I take it off and put it back again, it still does not work. From qwang at snf.stanford.edu Thu Dec 2 11:57:52 2004 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Thu, 2 Dec 2004 11:57:52 -0800 Subject: Shutdown gasonics SNF 2004-12-02 11:57:52: Message-ID: From cbaxter at snf.stanford.edu Thu Dec 2 17:43:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Dec 2004 17:43:41 -0800 Subject: Shutdown gasonics SNF 2004-12-02 11:57:52: Message-ID: adjusted flag on platform. From cbaxter at snf.stanford.edu Thu Dec 2 17:43:48 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Dec 2004 17:43:48 -0800 Subject: Problem gasonics SNF 2004-12-01 17:33:56: output cassete does not lower down Message-ID: From lsf at snf.stanford.edu Thu Dec 2 20:07:06 2004 From: lsf at snf.stanford.edu (lsf at snf.stanford.edu) Date: Thu, 2 Dec 2004 20:07:06 -0800 Subject: Problem gasonics SNF 2004-12-02 20:07:06: output casset cannot be initialized Message-ID: From cbaxter at snf.stanford.edu Thu Dec 2 21:41:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Dec 2004 21:41:23 -0800 Subject: Problem gasonics SNF 2004-12-02 20:07:06: output casset cannot be initialized Message-ID: From jinyao at snf.stanford.edu Fri Dec 3 22:03:18 2004 From: jinyao at snf.stanford.edu (jinyao at snf.stanford.edu) Date: Fri, 3 Dec 2004 22:03:18 -0800 Subject: Problem gasonics SNF 2004-12-03 22:03:17: Error: Door not closed Message-ID: Yellow light flashing... From tejask at snf.stanford.edu Sat Dec 4 17:02:59 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Sat, 4 Dec 2004 17:02:59 -0800 Subject: Problem gasonics SNF 2004-12-04 17:02:59: cannot close the door / load arm out Message-ID: yellow light flashing From flannery at snf.stanford.edu Sun Dec 5 22:08:20 2004 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Sun, 5 Dec 2004 22:08:20 -0800 Subject: Shutdown gasonics SNF 2004-12-05 22:08:19: Repeat Message-ID: Above problems are a shutdown, not a problem. From eenriquez at snf.stanford.edu Mon Dec 6 10:03:31 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2004 10:03:31 -0800 Subject: Shutdown gasonics SNF 2004-12-05 22:08:19: Repeat Message-ID: Reset the system and cycled several wafers. From eenriquez at snf.stanford.edu Mon Dec 6 10:42:18 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2004 10:42:18 -0800 Subject: Problem gasonics SNF 2004-12-04 17:02:59: cannot close the door / load arm out Message-ID: Reset the system and cycled several wafers. From eenriquez at snf.stanford.edu Mon Dec 6 10:42:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Dec 2004 10:42:41 -0800 Subject: Problem gasonics SNF 2004-12-03 22:03:17: Error: Door not closed Message-ID: Reset the system and cycled several wafers. From flannery at snf.stanford.edu Mon Dec 6 22:19:34 2004 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Mon, 6 Dec 2004 22:19:34 -0800 Subject: Shutdown gasonics SNF 2004-12-06 22:19:33: Same as last night Message-ID: Door not close error. From eenriquez at snf.stanford.edu Tue Dec 7 08:51:46 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Dec 2004 08:51:46 -0800 Subject: Shutdown gasonics SNF 2004-12-06 22:19:33: Same as last night Message-ID: adjusted chamber vent pressure from 10 to 15 psi. adjusted the out cassette present sensor. Cycle 25 wafers with no problems From chozone at snf.stanford.edu Tue Dec 7 23:11:50 2004 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Tue, 7 Dec 2004 23:11:50 -0800 Subject: Problem gasonics SNF 2004-12-07 23:11:49: Wafer is sticking in CH. B Message-ID: From chozone at snf.stanford.edu Tue Dec 7 23:12:45 2004 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Tue, 7 Dec 2004 23:12:45 -0800 Subject: Problem gasonics SNF 2004-12-07 23:12:44: Above is for P5000 sorry Message-ID: From flannery at snf.stanford.edu Wed Dec 8 07:19:19 2004 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Wed, 8 Dec 2004 07:19:19 -0800 Subject: Shutdown gasonics SNF 2004-12-08 07:19:18: Won't sense output casette Message-ID: Output casette not loaded error. Won't descend. From eenriquez at snf.stanford.edu Wed Dec 8 07:42:24 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2004 07:42:24 -0800 Subject: Shutdown gasonics SNF 2004-12-08 07:19:18: Won't sense output casette Message-ID: Reset the system. From eenriquez at snf.stanford.edu Wed Dec 8 07:42:46 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2004 07:42:46 -0800 Subject: Problem gasonics SNF 2004-12-07 23:12:44: Above is for P5000 sorry Message-ID: wrong tool From eenriquez at snf.stanford.edu Wed Dec 8 07:43:01 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2004 07:43:01 -0800 Subject: Problem gasonics SNF 2004-12-07 23:11:49: Wafer is sticking in CH. B Message-ID: wrong tool From eenriquez at snf.stanford.edu Wed Dec 8 07:44:19 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2004 07:44:19 -0800 Subject: Problem gasonics SNF 2004-12-08 07:44:12: Output cassette intermittently do not go down Message-ID: From eenriquez at snf.stanford.edu Wed Dec 8 09:22:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2004 09:22:11 -0800 Subject: Problem gasonics SNF 2004-12-08 07:44:12: Output cassette intermittently do not go down Message-ID: adjusted cassette up sensor From sanda at snf.stanford.edu Wed Dec 8 18:38:52 2004 From: sanda at snf.stanford.edu (sanda at snf.stanford.edu) Date: Wed, 8 Dec 2004 18:38:52 -0800 Subject: Problem gasonics SNF 2004-12-08 18:38:51: door not closed Message-ID: alarminig 'door not closed' From grupp at snf.stanford.edu Wed Dec 8 22:50:15 2004 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Wed, 8 Dec 2004 22:50:15 -0800 Subject: Shutdown gasonics SNF 2004-12-08 22:50:14: door not closed Message-ID: should have been shutdown by sanda who reported same thing. it is not a yellow, it is not usable! -dan From eenriquez at snf.stanford.edu Thu Dec 9 11:45:53 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2004 11:45:53 -0800 Subject: Shutdown gasonics SNF 2004-12-08 22:50:14: door not closed Message-ID: closed door From eenriquez at snf.stanford.edu Thu Dec 9 11:46:05 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Dec 2004 11:46:05 -0800 Subject: Problem gasonics SNF 2004-12-08 18:38:51: door not closed Message-ID: closed door From lsf at snf.stanford.edu Sun Dec 12 15:54:50 2004 From: lsf at snf.stanford.edu (lsf at snf.stanford.edu) Date: Sun, 12 Dec 2004 15:54:50 -0800 Subject: Shutdown gasonics SNF 2004-12-12 15:54:49: door is not closed Message-ID: From eenriquez at snf.stanford.edu Mon Dec 13 09:42:49 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Dec 2004 09:42:49 -0800 Subject: Shutdown gasonics SNF 2004-12-12 15:54:49: door is not closed Message-ID: reset the system From gyama at snf.stanford.edu Mon Dec 13 10:28:41 2004 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 13 Dec 2004 10:28:41 -0800 Subject: Problem gasonics SNF 2004-12-13 10:28:40: output cassette not going down Message-ID: From tejask at snf.stanford.edu Wed Dec 15 05:46:04 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Wed, 15 Dec 2004 05:46:04 -0800 Subject: Problem gasonics SNF 2004-12-15 05:46:04: Error: Load arm out Message-ID: Not able to clear error - yellow light flashing From eenriquez at snf.stanford.edu Wed Dec 15 09:17:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Dec 2004 09:17:21 -0800 Subject: Problem gasonics SNF 2004-12-15 05:46:04: Error: Load arm out Message-ID: Reset system. The root cause is that the output cassette control board has bad connectors. Will diassemble the output cassete during the shutdown. OK to use the gasonics for now. From cbaxter at snf.stanford.edu Wed Dec 15 16:43:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Dec 2004 16:43:27 -0800 Subject: Problem gasonics SNF 2004-12-13 10:28:40: output cassette not going down Message-ID: its wroking fine From eenriquez at snf.stanford.edu Wed Dec 22 15:38:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Dec 2004 15:38:40 -0800 Subject: Shutdown gasonics SNF 2004-12-22 15:38:40: unload cassette intermittently resets Message-ID: The cassette intermittently goes to the up (reset) position. From eenriquez at snf.stanford.edu Wed Dec 22 15:49:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Dec 2004 15:49:11 -0800 Subject: Shutdown gasonics SNF 2004-12-22 15:38:40: unload cassette intermittently resets Message-ID: Found the voltage regulator on the unload cassette controller was over heating. Will order a new 5 volt regulator. Installed a heat sink (strips of copper tape) on the regulator and using CDA to cool down the regulator.