Problem gasonics SNF 2004-12-03 22:03:17: Error: Door not closed
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Dec 6 10:42:41 PST 2004
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Problem gasonics SNF 2004-12-03 22:03:17: Error: Door not closed
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Problem gasonics SNF 2004-12-04 17:02:59: cannot close the door / load arm out
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Reset the system and cycled several wafers.
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Problem gasonics SNF 2004-12-03 22:03:17: Error: Door not closed
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Problem gasonics SNF 2004-12-04 17:02:59: cannot close the door / load arm out
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