Shutdown gasonics SNF 2004-12-06 22:19:33: Same as last night

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 7 08:51:46 PST 2004


adjusted chamber vent pressure from 10 to 15 psi. adjusted the out cassette present sensor.  Cycle 25 wafers with no problems




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