From kenney at snf.stanford.edu Tue Oct 12 09:51:07 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Tue, 12 Oct 2004 09:51:07 -0700 Subject: Problem gasonics SNF 2004-10-12 09:51:06: Wafer mis alignment Message-ID: Several users have had trouble with the wafer landing on top of one of the wafer handling pins instead of between all three. This has happened during loading and unloading, but primarily during unloading. From eenriquez at snf.stanford.edu Tue Oct 12 15:07:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Oct 2004 15:07:11 -0700 Subject: Problem gasonics SNF 2004-10-12 09:51:06: Wafer mis alignment Message-ID: Adjusted the unload arm From weigao at snf.stanford.edu Mon Oct 18 13:57:26 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Mon, 18 Oct 2004 13:57:26 -0700 Subject: Shutdown gasonics SNF 2004-10-18 13:57:25: wafer droped inside Message-ID: From eenriquez at snf.stanford.edu Mon Oct 18 14:46:04 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2004 14:46:04 -0700 Subject: Shutdown gasonics SNF 2004-10-18 13:57:25: wafer droped inside Message-ID: Recovered wafers. Cycled wafers with no problems. From yeh at snf.stanford.edu Sat Oct 23 11:15:10 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Sat, 23 Oct 2004 11:15:10 -0700 Subject: Problem gasonics SNF 2004-10-23 11:15:09: wafers not loading Message-ID: robot comes up under input wafer but does not move wafer out. From dwburns at snf.stanford.edu Mon Oct 25 05:21:59 2004 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Mon, 25 Oct 2004 05:21:59 -0700 Subject: Problem gasonics SNF 2004-10-25 05:21:58: Wafers loading marginally Message-ID: Six of six wafers loaded and etched suitably, however, two of the six wafers "overshot" the lower right post of the wafer loader and were etched at a crooked angle. From eenriquez at snf.stanford.edu Mon Oct 25 10:15:42 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Oct 2004 10:15:42 -0700 Subject: Problem gasonics SNF 2004-10-25 05:21:58: Wafers loading marginally Message-ID: Adjusted handler. Cycled about 15 wafers with no problems. From eenriquez at snf.stanford.edu Mon Oct 25 10:21:56 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Oct 2004 10:21:56 -0700 Subject: Problem gasonics SNF 2004-10-23 11:15:09: wafers not loading Message-ID: Adjusted the handler. Please verfy that all wafers in the load cassette are at the bottom (push all the way to the left when they ae on the loader). From mislam at snf.stanford.edu Thu Oct 28 08:13:24 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 28 Oct 2004 08:13:24 -0700 Subject: Problem gasonics SNF 2004-10-28 08:13:23: Wafer handler problem Message-ID: Wafer handler is bumping on wafer after droping wafer on wafer carrier, that results in wafer being droped off carrier. From eenriquez at snf.stanford.edu Thu Oct 28 13:44:28 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 28 Oct 2004 13:44:28 -0700 Subject: Problem gasonics SNF 2004-10-28 08:13:23: Wafer handler problem Message-ID: Adjusted the center finger on the nest. Rerouted the vacuum line on the unload arm. From bongsang at snf.stanford.edu Sat Oct 30 14:58:38 2004 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Sat, 30 Oct 2004 14:58:38 -0700 Subject: Shutdown gasonics SNF 2004-10-30 14:58:37: error : door not closed Message-ID: