Problem gasonics SNF 2004-10-12 09:51:06: Wafer mis alignment

kenney at snf.stanford.edu kenney at snf.stanford.edu
Tue Oct 12 09:51:07 PDT 2004


Several users have had trouble with the wafer landing on top
of one of the wafer handling pins instead of between all three.
This has happened during loading and unloading, but
primarily during unloading.




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