Problem gasonics SNF 2004-10-25 05:21:58: Wafers loading marginally
dwburns at snf.stanford.edu
dwburns at snf.stanford.edu
Mon Oct 25 05:21:59 PDT 2004
Six of six wafers loaded and etched suitably, however, two of the six wafers "overshot" the lower right post of the wafer loader and were etched at a crooked angle.
More information about the gasonics-pcs
mailing list