Problem gasonics SNF 2004-10-25 05:21:58: Wafers loading marginally

dwburns at snf.stanford.edu dwburns at snf.stanford.edu
Mon Oct 25 05:21:59 PDT 2004


Six of six wafers loaded and etched suitably, however, two of the six wafers "overshot" the lower right post of the wafer loader and were etched at a crooked angle.




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