Problem gasonics SNF 2004-10-28 08:13:23: Wafer handler problem

mislam at snf.stanford.edu mislam at snf.stanford.edu
Thu Oct 28 08:13:24 PDT 2004


Wafer handler is bumping on wafer after droping wafer
on wafer carrier, that results in wafer being droped off
carrier.




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