From king at snf.stanford.edu  Mon Apr  4 14:34:18 2005
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Mon, 4 Apr 2005 14:34:18 -0700
Subject: Shutdown gasonics SNF 2005-04-04 14:34:18: Gasonics dropped and then smashed a wafer
Message-ID: <mailman.101.1356281730.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr  4 16:17:05 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Apr 2005 16:17:05 -0700
Subject: Shutdown gasonics SNF 2005-04-04 14:34:18: Gasonics dropped and then smashed a wafer
Message-ID: <mailman.102.1356281730.3883.gasonics-pcs@snf.stanford.edu>

Cleaned up smashed wafer pieces. Adjusted wafer nest leveling and load arm hand-off position.  Cycled 25 wafers with no problem