Shutdown gasonics SNF 2005-04-04 14:34:18: Gasonics dropped and then smashed a wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 4 16:17:05 PDT 2005


Cleaned up smashed wafer pieces. Adjusted wafer nest leveling and load arm hand-off position.  Cycled 25 wafers with no problem




More information about the gasonics-pcs mailing list