From eenriquez at snf.stanford.edu Mon Aug 1 07:57:54 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:57:54 -0700 Subject: Comment gasonics SNF 2005-07-30 12:50:35: problem fixed! Message-ID: Problem fixed From eenriquez at snf.stanford.edu Mon Aug 1 09:06:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Aug 2005 09:06:30 -0700 Subject: Problem gasonics SNF 2005-07-30 11:29:37: door is not closing Message-ID: problem fixed by user From crichter at snf.stanford.edu Thu Aug 11 12:52:06 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 11 Aug 2005 12:52:06 -0700 Subject: Shutdown gasonics SNF 2005-08-11 12:52:05: Gasonics had done a Precautionary Shutdown Message-ID: I was using program #016 and when the next wafer went inside the chamber, I got the following error: Precautionary System Shutdown Buss error C; from 9800. Nothing happens after pressing stop or start.....and my wafer is inside the chamber. From eenriquez at snf.stanford.edu Thu Aug 11 15:38:56 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Aug 2005 15:38:56 -0700 Subject: Shutdown gasonics SNF 2005-08-11 12:52:05: Gasonics had done a Precautionary Shutdown Message-ID: System had a software glitch. Reset the system. From djwong at snf.stanford.edu Mon Aug 15 23:19:26 2005 From: djwong at snf.stanford.edu (djwong at snf.stanford.edu) Date: Mon, 15 Aug 2005 23:19:26 -0700 Subject: Shutdown gasonics SNF 2005-08-15 23:19:25: Wafer is stuck Message-ID: Error when "Clearing wafer path". Message shows "Chamber door not fully open". My wafer is stuck inside. From emyers at snf.stanford.edu Tue Aug 16 15:39:11 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 16 Aug 2005 15:39:11 -0700 Subject: Shutdown gasonics SNF 2005-08-15 23:19:25: Wafer is stuck Message-ID: Opened chamber and remove all the broken pieces. From crichter at snf.stanford.edu Mon Aug 29 18:13:09 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 29 Aug 2005 18:13:09 -0700 Subject: Problem gasonics SNF 2005-08-29 18:13:08: wafer will not come out of the chamber Message-ID: From crichter at snf.stanford.edu Mon Aug 29 18:13:29 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 29 Aug 2005 18:13:29 -0700 Subject: Shutdown gasonics SNF 2005-08-29 18:13:28: cannot operate gasonics Message-ID: From cbaxter at snf.stanford.edu Mon Aug 29 18:19:24 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 29 Aug 2005 18:19:24 -0700 Subject: Shutdown gasonics SNF 2005-08-29 18:13:28: cannot operate gasonics Message-ID: system is ok. was able unload wafer on auto mode. From cbaxter at snf.stanford.edu Mon Aug 29 18:19:31 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 29 Aug 2005 18:19:31 -0700 Subject: Problem gasonics SNF 2005-08-29 18:13:08: wafer will not come out of the chamber Message-ID: From gyama at snf.stanford.edu Tue Aug 30 12:35:54 2005 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 30 Aug 2005 12:35:54 -0700 Subject: Problem gasonics SNF 2005-08-30 12:35:52: load arm cannot aquire wafer Message-ID: From eenriquez at snf.stanford.edu Tue Aug 30 14:19:05 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Aug 2005 14:19:05 -0700 Subject: Problem gasonics SNF 2005-08-30 12:35:52: load arm cannot aquire wafer Message-ID: Cleared error. Ran 6 wafers (recipe 13) with no problems.