Shutdown gasonics SNF 2005-08-11 12:52:05: Gasonics had done a Precautionary Shutdown

crichter at snf.stanford.edu crichter at snf.stanford.edu
Thu Aug 11 12:52:06 PDT 2005


I was using program #016 and when the next wafer went inside the chamber, I got the following error: Precautionary System Shutdown Buss error C; from 9800. Nothing happens after pressing stop or start.....and my wafer is inside the chamber.




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