Shutdown gasonics SNF 2005-08-11 12:52:05: Gasonics had done a Precautionary Shutdown

[crichter at snf.stanford.edu]

I was using program #016 and when the next wafer went inside the chamber, I got the following error: Precautionary System Shutdown Buss error C; from 9800. Nothing happens after pressing stop or start.....and my wafer is inside the chamber.