From eenriquez at snf.stanford.edu Mon Jan 3 15:57:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Jan 2005 15:57:30 -0800 Subject: Comment gasonics SNF 2005-01-03 15:57:29: Work done during shutdown Message-ID: Temporary repair of the output cassette elevator was to cool down a voltage regulator with CDA. The part should be here in about a week. Releveled the cassette elevators and the robot arms. From mislam at snf.stanford.edu Fri Jan 7 05:43:01 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 7 Jan 2005 05:43:01 -0800 Subject: Shutdown gasonics SNF 2005-01-07 05:43:01: load arm problem Message-ID: Loading arm won't go up. From eenriquez at snf.stanford.edu Fri Jan 7 08:04:41 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Jan 2005 08:04:41 -0800 Subject: Shutdown gasonics SNF 2005-01-07 05:43:01: load arm problem Message-ID: No problem found. Cycled several wafers with no problems. From amyers at snf.stanford.edu Mon Jan 10 09:30:39 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Mon, 10 Jan 2005 09:30:39 -0800 Subject: Problem gasonics SNF 2005-01-10 09:30:39: wafer transport needs adjusting Message-ID: wafer does not always lay correctly in the cage From cbaxter at snf.stanford.edu Mon Jan 10 16:16:31 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Jan 2005 16:16:31 -0800 Subject: Problem gasonics SNF 2005-01-10 09:30:39: wafer transport needs adjusting Message-ID: adjusted wafer placement. From emyers at snf.stanford.edu Fri Jan 14 14:48:24 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Jan 2005 14:48:24 -0800 Subject: Problem gasonics SNF 2005-01-14 14:48:23: Wafer Handling Message-ID: Still seeing the wafer not being placed in the center of the tray. Same problem as the last time. From gyama at snf.stanford.edu Fri Jan 14 14:58:12 2005 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 14 Jan 2005 14:58:12 -0800 Subject: Problem gasonics SNF 2005-01-14 14:58:12: during unload, won't go into exit cassette Message-ID: From daesung at snf.stanford.edu Sun Jan 16 23:27:58 2005 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sun, 16 Jan 2005 23:27:58 -0800 Subject: Problem gasonics SNF 2005-01-16 23:27:57: Wafer handling during unload Message-ID: From eenriquez at snf.stanford.edu Tue Jan 18 14:50:07 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Jan 2005 14:50:07 -0800 Subject: Problem gasonics SNF 2005-01-16 23:27:57: Wafer handling during unload Message-ID: Adjusted the robot arm stop positions. cycled 10 wafers with no problems. From eenriquez at snf.stanford.edu Tue Jan 18 14:50:26 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Jan 2005 14:50:26 -0800 Subject: Problem gasonics SNF 2005-01-14 14:48:23: Wafer Handling Message-ID: Adjusted the robot arm stop positions. cycled 10 wafers with no problems. From eenriquez at snf.stanford.edu Tue Jan 18 14:50:38 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Jan 2005 14:50:38 -0800 Subject: Problem gasonics SNF 2005-01-14 14:58:12: during unload, won't go into exit cassette Message-ID: Adjusted the robot arm stop positions. cycled 10 wafers with no problems. From kevhuang at snf.stanford.edu Thu Jan 20 13:33:08 2005 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Thu, 20 Jan 2005 13:33:08 -0800 Subject: Problem gasonics SNF 2005-01-20 13:33:07: load arm aren't fully down Message-ID: From cbaxter at snf.stanford.edu Thu Jan 20 16:57:02 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 20 Jan 2005 16:57:02 -0800 Subject: Problem gasonics SNF 2005-01-20 13:33:07: load arm aren't fully down Message-ID: found load up sensor flag jammed. adjusted flag. From jgarate at snf.stanford.edu Mon Jan 31 13:34:16 2005 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Mon, 31 Jan 2005 13:34:16 -0800 Subject: Shutdown gasonics SNF 2005-01-31 13:34:15: Unload cassette does not go down Message-ID: Having a problem with unload cassette not going down. There is a wafer inside . From eenriquez at snf.stanford.edu Mon Jan 31 13:55:48 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Jan 2005 13:55:48 -0800 Subject: Shutdown gasonics SNF 2005-01-31 13:34:15: Unload cassette does not go down Message-ID: Unload motor connector was loose.