From ianw at snf.stanford.edu Fri Jul 15 15:12:56 2005 From: ianw at snf.stanford.edu (ianw at snf.stanford.edu) Date: Fri, 15 Jul 2005 15:12:56 -0700 Subject: Shutdown gasonics SNF 2005-07-15 15:12:56: wafer broke Message-ID: wafer broke during gasonics operation From cbaxter at snf.stanford.edu Fri Jul 15 16:16:25 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 15 Jul 2005 16:16:25 -0700 Subject: Shutdown gasonics SNF 2005-07-15 15:12:56: wafer broke Message-ID: vacuum broken wafer chips on reciever and adjusted unload arm to clear wafer detection. From seoung at snf.stanford.edu Mon Jul 25 14:50:52 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Mon, 25 Jul 2005 14:50:52 -0700 Subject: Problem gasonics SNF 2005-07-25 14:50:52: broken wafer Message-ID: One of my wafers was broken during a process. The wafer was broken into two big pieces and fortunately I could find them. But there could be some debris left inside the chamber. From cbaxter at snf.stanford.edu Mon Jul 25 19:36:18 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 25 Jul 2005 19:36:18 -0700 Subject: Problem gasonics SNF 2005-07-25 14:50:52: broken wafer Message-ID: vented chambed and wipe down with ipa and water. From me342d at snf.stanford.edu Sat Jul 30 11:29:38 2005 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Sat, 30 Jul 2005 11:29:38 -0700 Subject: Problem gasonics SNF 2005-07-30 11:29:37: door is not closing Message-ID: The door to the chamber is not closing so the machine isn't allowing you to load programs and process wafers. From me342d at snf.stanford.edu Sat Jul 30 12:50:36 2005 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Sat, 30 Jul 2005 12:50:36 -0700 Subject: Comment gasonics SNF 2005-07-30 12:50:35: problem fixed! Message-ID: