Problem gasonics SNF 2005-07-25 14:50:52: broken wafer

seoung at snf.stanford.edu seoung at snf.stanford.edu
Mon Jul 25 14:50:52 PDT 2005


One of my wafers was broken during a process. The wafer was broken into two big pieces and fortunately I could find them. But there could be some debris left inside the chamber.




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