From eenriquez at snf.stanford.edu Wed Jun 1 16:56:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Jun 2005 16:56:58 -0700 Subject: Shutdown gasonics SNF 2005-05-31 11:52:49: receiver cassette does not go down Message-ID: Still troubleshooting the output cassette. If users really need to process their wafer, they can run one wafer at a time by following this procedure: 1) Load one wafer into the input cassete. 2) Select recipe and start process. 3) Allow the wafer to unload into the unload cassette. 4) The system will fault for "Unload cassette Full". 5) Using tweezers, take the wafer from the unload cassette 6) Press the "Stop" button to abort. 7) If you have more wafers to process, lift the load cassette and load another wafer. From tejask at snf.stanford.edu Thu Jun 2 03:57:56 2005 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Thu, 2 Jun 2005 03:57:56 -0700 Subject: Shutdown gasonics SNF 2005-06-02 03:57:55: Not responding Message-ID: Error: Output Cassette Full From eenriquez at snf.stanford.edu Thu Jun 2 12:09:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Jun 2005 12:09:51 -0700 Subject: Shutdown gasonics SNF 2005-06-02 03:57:55: Not responding Message-ID: Still working on the system but will release on a temporary basis Changed jumpers on the indexer control board to enable the system to operate. -The output cassette still does not index. - Will now be able to load mutiple wafers in the send cassete - IMPORTANT: Need to remove the wafer from the unload cassete before the next wafer is finished processing. From cbaxter at snf.stanford.edu Thu Jun 2 18:05:26 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Jun 2005 18:05:26 -0700 Subject: Problem gasonics SNF 2005-05-31 11:04:32: receiver cassette goes down 2 slots only Message-ID: From cbaxter at snf.stanford.edu Thu Jun 2 18:05:33 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Jun 2005 18:05:33 -0700 Subject: Problem gasonics SNF 2005-05-31 09:06:16: Output cassette lowers inconsistently to an incorrect slot or will move upwards after a wafer has finished. Message-ID: From cbaxter at snf.stanford.edu Thu Jun 2 18:06:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Jun 2005 18:06:52 -0700 Subject: Problem gasonics SNF 2005-05-28 15:19:17: gasonics Message-ID: changed receiver indexer pcb and re-level elevator platform and align wafer handoff. From grupp at snf.stanford.edu Tue Jun 28 14:52:56 2005 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Tue, 28 Jun 2005 14:52:56 -0700 Subject: Problem gasonics SNF 2005-06-28 14:52:55: sometimes won't lift wafer Message-ID: tries a few times, fails, hit process again, tired, then finally gets it. From eenriquez at snf.stanford.edu Tue Jun 28 16:20:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Jun 2005 16:20:27 -0700 Subject: Problem gasonics SNF 2005-06-28 14:52:55: sometimes won't lift wafer Message-ID: Leveled robot arm to the wafer. Cycled 8 wafers with no problems. From eenriquez at snf.stanford.edu Wed Jun 29 16:17:53 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Jun 2005 16:17:53 -0700 Subject: Shutdown gasonics SNF 2005-06-29 16:17:52: Wafers not picked up from the load cassette Message-ID: From cbaxter at snf.stanford.edu Wed Jun 29 17:01:44 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 29 Jun 2005 17:01:44 -0700 Subject: Shutdown gasonics SNF 2005-06-29 16:17:52: Wafers not picked up from the load cassette Message-ID: adjusted vacuum switch and load arm up pick up.