Shutdown gasonics SNF 2005-05-31 11:52:49: receiver cassette does not go down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 1 16:56:58 PDT 2005


Still troubleshooting the output cassette.  If users really need to process their wafer, they can run one wafer at a time by following this procedure:
 1) Load one wafer into the input cassete.
 2) Select recipe and start process.
 3) Allow the wafer to unload into the unload cassette.
 4) The system will fault for "Unload cassette Full".
 5) Using tweezers, take the wafer from the unload cassette
 6) Press the "Stop" button to abort.
 7) If you have more wafers to process, lift the load cassette and load another wafer.




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