Shutdown gasonics SNF 2005-06-29 16:17:52: Wafers not picked up from the load cassette

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jun 29 17:01:44 PDT 2005

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adjusted vacuum switch and load arm up pick up.

Previous message: Shutdown gasonics SNF 2005-06-29 16:17:52: Wafers not picked up from the load cassette
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