From amyers at snf.stanford.edu  Wed Mar  2 09:21:08 2005
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Wed, 2 Mar 2005 09:21:08 -0800
Subject: Problem gasonics SNF 2005-03-02 09:20:51: piece of crap tool slammed my wafers so hard
Message-ID: <mailman.95.1356281730.3883.gasonics-pcs@snf.stanford.edu>

into the receive cassette it broke them



From eenriquez at snf.stanford.edu  Wed Mar  2 13:24:11 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 2 Mar 2005 13:24:11 -0800
Subject: Problem gasonics SNF 2005-03-02 09:20:51: piece of crap tool slammed my wafers so hard
Message-ID: <mailman.96.1356281730.3883.gasonics-pcs@snf.stanford.edu>

One of the wafer pins was loose.  Tightened pin and ran about 30 wafers with no problems.  Also cleaned cassettes.



From king at snf.stanford.edu  Wed Mar 23 17:28:52 2005
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Wed, 23 Mar 2005 17:28:52 -0800
Subject: Problem gasonics SNF 2005-03-23 17:28:52: Gasonics receiver error
Message-ID: <mailman.97.1356281730.3883.gasonics-pcs@snf.stanford.edu>

Errors during wafer unloading.   Sometimes the wafer bumped the cassette out of position.  Could be the wand position.



From cbaxter at snf.stanford.edu  Wed Mar 23 18:41:02 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 23 Mar 2005 18:41:02 -0800
Subject: Problem gasonics SNF 2005-03-23 17:28:52: Gasonics receiver error
Message-ID: <mailman.98.1356281730.3883.gasonics-pcs@snf.stanford.edu>

adjusted unload arm.



From kone at snf.stanford.edu  Wed Mar 30 11:21:38 2005
From: kone at snf.stanford.edu (kone at snf.stanford.edu)
Date: Wed, 30 Mar 2005 11:21:38 -0800
Subject: Problem gasonics SNF 2005-03-30 11:21:37: output cassette indexing incorrectly
Message-ID: <mailman.99.1356281730.3883.gasonics-pcs@snf.stanford.edu>

The first wafer goes through just fine, but then the cassette indexes someplace in the middle or all the way to the end (and reports an error saying the output cassette isn't ready).  When you push start to resume, it indexes up a little bit and then continues....



From eenriquez at snf.stanford.edu  Wed Mar 30 14:19:11 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 30 Mar 2005 14:19:11 -0800
Subject: Problem gasonics SNF 2005-03-30 11:21:37: output cassette indexing incorrectly
Message-ID: <mailman.100.1356281730.3883.gasonics-pcs@snf.stanford.edu>

Adjusted output robot arm extension into the cassette.  Cycle seven wafers with no problems