From emyers at snf.stanford.edu Wed May 4 09:07:52 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 4 May 2005 09:07:52 -0700 Subject: Problem gasonics SNF 2005-05-04 09:07:52: Poor Wafer Loading Message-ID: Load arm dropping wafer off about a quater inch short. From emyers at snf.stanford.edu Wed May 4 11:51:58 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 4 May 2005 11:51:58 -0700 Subject: Problem gasonics SNF 2005-05-04 09:07:52: Poor Wafer Loading Message-ID: Elmer adjusted handling From eenriquez at snf.stanford.edu Wed May 18 16:09:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 May 2005 16:09:58 -0700 Subject: Problem gasonics SNF 2005-05-18 16:09:58: load arm not picking up wafer Message-ID: From eenriquez at snf.stanford.edu Thu May 19 09:33:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 May 2005 09:33:50 -0700 Subject: Problem gasonics SNF 2005-05-18 16:09:58: load arm not picking up wafer Message-ID: Re-leveled the load arm. Cycled 40 wafers with no problems From fengj at snf.stanford.edu Tue May 24 16:10:15 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Tue, 24 May 2005 16:10:15 -0700 Subject: Problem gasonics SNF 2005-05-24 16:10:12: output cassette won't go down Message-ID: From eenriquez at snf.stanford.edu Wed May 25 13:02:04 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 May 2005 13:02:04 -0700 Subject: Problem gasonics SNF 2005-05-24 16:10:12: output cassette won't go down Message-ID: No problem found. the cassette was already down. Ran 10 wafers with no problems. From king at snf.stanford.edu Sat May 28 15:19:18 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 28 May 2005 15:19:18 -0700 Subject: Problem gasonics SNF 2005-05-28 15:19:17: gasonics Message-ID: The receiver cassette arbitrarily drops down too far and doesn't leave enough room for the finished wafers. Thanks. From dwburns at snf.stanford.edu Tue May 31 09:06:18 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Tue, 31 May 2005 09:06:18 -0700 Subject: Problem gasonics SNF 2005-05-31 09:06:16: Output cassette lowers inconsistently to an incorrect slot or will move upwards after a wafer has finished. Message-ID: From gladys at snf.stanford.edu Tue May 31 11:04:32 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 31 May 2005 11:04:32 -0700 Subject: Problem gasonics SNF 2005-05-31 11:04:32: receiver cassette goes down 2 slots only Message-ID: From gladys at snf.stanford.edu Tue May 31 11:52:50 2005 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 31 May 2005 11:52:50 -0700 Subject: Shutdown gasonics SNF 2005-05-31 11:52:49: receiver cassette does not go down Message-ID: