Problem gasonics SNF 2005-05-18 16:09:58: load arm not picking up wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu May 19 09:33:50 PDT 2005
Re-leveled the load arm. Cycled 40 wafers with no problems
More information about the gasonics-pcs
mailing list