Problem gasonics SNF 2005-05-31 11:04:32: receiver cassette goes down 2 slots only
gladys at snf.stanford.edu
gladys at snf.stanford.edu
Tue May 31 11:04:32 PDT 2005
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Problem gasonics SNF 2005-05-31 09:06:16: Output cassette lowers inconsistently to an incorrect slot or will move upwards after a wafer has finished.
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Shutdown gasonics SNF 2005-05-31 11:52:49: receiver cassette does not go down
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Problem gasonics SNF 2005-05-31 09:06:16: Output cassette lowers inconsistently to an incorrect slot or will move upwards after a wafer has finished.
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Shutdown gasonics SNF 2005-05-31 11:52:49: receiver cassette does not go down
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