From nvgirish at snf.stanford.edu  Wed Oct 12 02:15:54 2005
From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu)
Date: Wed, 12 Oct 2005 02:15:54 -0700
Subject: Problem gasonics SNF 2005-10-12 02:15:53: Base pressure problem
Message-ID: <mailman.143.1356281730.3883.gasonics-pcs@snf.stanford.edu>

Gave the error "base pressure out of limits". Process ran ok.



From cbaxter at snf.stanford.edu  Wed Oct 12 17:59:01 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 12 Oct 2005 17:59:01 -0700
Subject: Problem gasonics SNF 2005-10-12 02:15:53: Base pressure problem
Message-ID: <mailman.144.1356281730.3883.gasonics-pcs@snf.stanford.edu>

base pressure was ok ar 2torr



From yue at snf.stanford.edu  Thu Oct 13 18:27:58 2005
From: yue at snf.stanford.edu (yue at snf.stanford.edu)
Date: Thu, 13 Oct 2005 18:27:58 -0700
Subject: Problem gasonics SNF 2005-10-13 18:27:58: base pressure out of limites error occured frequently
Message-ID: <mailman.145.1356281730.3883.gasonics-pcs@snf.stanford.edu>




From foxpp at snf.stanford.edu  Thu Oct 20 17:09:19 2005
From: foxpp at snf.stanford.edu (foxpp at snf.stanford.edu)
Date: Thu, 20 Oct 2005 17:09:19 -0700
Subject: Comment gasonics SNF 2005-10-20 17:09:18: Unload arm lost vacuum
Message-ID: <mailman.146.1356281730.3883.gasonics-pcs@snf.stanford.edu>

Which break my wafer.