Comment gasonics SNF 2005-10-20 17:09:18: Unload arm lost vacuum
foxpp at snf.stanford.edu
foxpp at snf.stanford.edu
Thu Oct 20 17:09:19 PDT 2005
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Problem gasonics SNF 2005-10-13 18:27:58: base pressure out of limites error occured frequently
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Which break my wafer.
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Problem gasonics SNF 2005-10-13 18:27:58: base pressure out of limites error occured frequently
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