From kkumar at snf.stanford.edu Tue Mar 7 19:37:05 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Tue, 7 Mar 2006 19:37:05 -0800 Subject: Problem gasonics SNF 2006-03-07 19:37:04: Chamber door will not fully close Message-ID: I tried to load wafers into it, and the plastic cover on top got in the way of the tray as it was trying to go into the chamber. tried aborting, but was unable to pull out the tray to release the plastic cover. i pulled out my wafer intact, and disabled the machine. From eenriquez at snf.stanford.edu Tue Mar 7 21:22:35 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Mar 2006 21:22:35 -0800 Subject: Problem gasonics SNF 2006-03-07 19:37:04: Chamber door will not fully close Message-ID: Plastic cover was installed sideways. Powered down the system, separated the plastic cover from the door and reset. From korgan at snf.stanford.edu Wed Mar 8 00:59:38 2006 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Wed, 8 Mar 2006 00:59:38 -0800 Subject: Problem gasonics SNF 2006-03-08 00:59:38: Output Arm pneumatic problem Message-ID: Output Arm pneumatic problem - Requires the operator to touch the sensor on backside of arm inorder for the unit to pneumatically seal to wafer and unload. From fengj at snf.stanford.edu Wed Mar 8 13:06:05 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 8 Mar 2006 13:06:05 -0800 Subject: Shutdown gasonics SNF 2006-03-08 13:06:04: machine stuck in unloading wafer Message-ID: From emyers at snf.stanford.edu Wed Mar 8 13:48:26 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 8 Mar 2006 13:48:26 -0800 Subject: Comment gasonics SNF 2006-03-08 13:48:26: Output Handler Message-ID: Not picking wafer up on the output side. Height adjustment appears to be out. From eenriquez at snf.stanford.edu Wed Mar 8 20:27:11 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Mar 2006 20:27:11 -0800 Subject: Comment gasonics SNF 2006-03-08 13:48:26: Output Handler Message-ID: Adjusted the wafer tray height. Cycled 6 wafers with no problems. From eenriquez at snf.stanford.edu Wed Mar 8 20:27:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Mar 2006 20:27:23 -0800 Subject: Shutdown gasonics SNF 2006-03-08 13:06:04: machine stuck in unloading wafer Message-ID: Adjusted the wafer tray height. Cycled 6 wafers with no problems. From eenriquez at snf.stanford.edu Wed Mar 8 20:27:32 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Mar 2006 20:27:32 -0800 Subject: Problem gasonics SNF 2006-03-08 00:59:38: Output Arm pneumatic problem Message-ID: Adjusted the wafer tray height. Cycled 6 wafers with no problems. From gyama at snf.stanford.edu Fri Mar 17 09:33:41 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 17 Mar 2006 09:33:41 -0800 Subject: Problem gasonics SNF 2006-03-17 09:33:40: not picking up wafer Message-ID: From eenriquez at snf.stanford.edu Fri Mar 17 10:51:27 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Mar 2006 10:51:27 -0800 Subject: Problem gasonics SNF 2006-03-17 09:33:40: not picking up wafer Message-ID: The system was trying to pick-up a wafer from the input cassette and the process tray at the same time. Aborted the recipe and re-ran it with no problems. From gyama at snf.stanford.edu Mon Mar 20 15:16:56 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 20 Mar 2006 15:16:56 -0800 Subject: Problem gasonics SNF 2006-03-20 15:16:56: vac not picking up wafer at unload side Message-ID: From cbaxter at snf.stanford.edu Mon Mar 20 15:57:37 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Mar 2006 15:57:37 -0800 Subject: Problem gasonics SNF 2006-03-20 15:16:56: vac not picking up wafer at unload side Message-ID: adjusted unload wafer pick up From kkumar at snf.stanford.edu Fri Mar 31 18:47:20 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Fri, 31 Mar 2006 18:47:20 -0800 Subject: Problem gasonics SNF 2006-03-31 18:47:19: Dropping Wafers Message-ID: No matter how well my flats are aligned, the loading system drops my wafer to the floor. Had to retrieve it thrice.