Problem gasonics SNF 2006-03-07 19:37:04: Chamber door will not fully close

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Tue Mar 7 19:37:05 PST 2006


I tried to load wafers into it, and the plastic cover on top got in the way of the tray as it was trying to go into the chamber. tried aborting, but was unable to pull out the tray to release the plastic cover. i pulled out my wafer intact, and disabled the machine.




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