Problem gasonics SNF 2006-03-07 19:37:04: Chamber door will not fully close

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 7 21:22:35 PST 2006


Plastic cover was installed sideways.  Powered down the system, separated the plastic cover from the door and reset.




More information about the gasonics-pcs mailing list