Problem gasonics SNF 2006-03-08 00:59:38: Output Arm pneumatic problem

korgan at snf.stanford.edu korgan at snf.stanford.edu
Wed Mar 8 00:59:38 PST 2006


Output Arm pneumatic problem - Requires the operator to touch the sensor on backside of arm inorder for the unit to pneumatically seal to wafer and unload.




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