Problem gasonics SNF 2006-03-17 09:33:40: not picking up wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 17 10:51:27 PST 2006


The system was trying to pick-up a wafer from the input cassette and the process tray at the same time.  Aborted the recipe and re-ran it with no problems.




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