From pethe at snf.stanford.edu Wed May 3 00:05:44 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Wed, 3 May 2006 00:05:44 -0700 Subject: Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers. Message-ID: My wafer dropped. The system could not shut the door From emyers at snf.stanford.edu Wed May 3 09:10:31 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 May 2006 09:10:31 -0700 Subject: Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers. Message-ID: Wafer tray pin loose. Tightened and retrieved wafer. Put in Gasonics Dummy box, but wafer was touched with gloves. From mtang at snf.stanford.edu Thu May 11 14:39:05 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 11 May 2006 14:39:05 -0700 Subject: Shutdown gasonics SNF 2006-05-11 14:39:03: No oxygen or hydrogen Message-ID: From tura at snf.stanford.edu Thu May 11 20:21:55 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 11 May 2006 20:21:55 -0700 Subject: Comment gasonics SNF 2006-05-11 20:21:55: please green light the tool Message-ID: From eenriquez at snf.stanford.edu Fri May 12 07:17:38 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 May 2006 07:17:38 -0700 Subject: Shutdown gasonics SNF 2006-05-11 14:39:03: No oxygen or hydrogen Message-ID: Oxygen is now available From jrjain at snf.stanford.edu Sun May 14 16:09:05 2006 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 14 May 2006 16:09:05 -0700 Subject: Problem gasonics SNF 2006-05-14 16:09:03: Send arm slides along wafer Message-ID: The send arm slides along the bottom of wafers placed onto the carrier when returning to the send cassette. The contact is obvious via sound and wafer movement. From cbaxter at snf.stanford.edu Mon May 15 08:21:23 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:21:23 -0700 Subject: Problem gasonics SNF 2006-05-14 16:09:03: Send arm slides along wafer Message-ID: level sender load arm and nest From cbaxter at snf.stanford.edu Mon May 15 08:21:41 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:21:41 -0700 Subject: Comment gasonics SNF 2006-05-11 20:21:55: please green light the tool Message-ID: From cbaxter at snf.stanford.edu Mon May 15 08:22:07 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:22:07 -0700 Subject: Problem gasonics SNF 2006-05-14 16:09:03: Send arm slides along wafer Message-ID: changed wafer clips From cbaxter at snf.stanford.edu Mon May 15 08:22:15 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:22:15 -0700 Subject: Comment gasonics SNF 2006-05-11 20:21:55: please green light the tool Message-ID: From kimfisher at snf.stanford.edu Mon May 22 11:12:11 2006 From: kimfisher at snf.stanford.edu (kimfisher at snf.stanford.edu) Date: Mon, 22 May 2006 11:12:11 -0700 Subject: Problem gasonics SNF 2006-05-22 11:12:10: after resist strip Message-ID: Noticed wafer not positioned in the center of the 3 pins at unload causing an error. From cbaxter at snf.stanford.edu Wed May 24 10:31:03 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 24 May 2006 10:31:03 -0700 Subject: Problem gasonics SNF 2006-05-22 11:12:10: after resist strip Message-ID: level nest and cycled system w/out problem.