Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers.
pethe at snf.stanford.edu
pethe at snf.stanford.edu
Wed May 3 00:05:44 PDT 2006
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Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers.
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My wafer dropped. The system could not shut the door
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Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers.
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