Shutdown gasonics SNF 2006-05-03 00:05:43: Dropping wafers.
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Wed May 3 09:10:31 PDT 2006
Wafer tray pin loose. Tightened and retrieved wafer. Put in Gasonics Dummy box, but wafer was touched with gloves.
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