Problem gasonics SNF 2006-05-14 16:09:03: Send arm slides along wafer

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sun May 14 16:09:05 PDT 2006


The send arm slides along the bottom of wafers placed onto the carrier when returning to the send cassette.  The contact is obvious via sound and wafer movement.




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