Problem gasonics SNF 2006-05-14 16:09:03: Send arm slides along wafer
jrjain at snf.stanford.edu
jrjain at snf.stanford.edu
Sun May 14 16:09:05 PDT 2006
The send arm slides along the bottom of wafers placed onto the carrier when returning to the send cassette. The contact is obvious via sound and wafer movement.
More information about the gasonics-pcs
mailing list