From chozone at snf.stanford.edu  Mon Nov 27 19:04:31 2006
From: chozone at snf.stanford.edu (chozone at snf.stanford.edu)
Date: Mon, 27 Nov 2006 19:04:31 -0800
Subject: Problem gasonics SNF 2006-11-27 19:04:31: Wafer unloading
Message-ID: <mailman.192.1356281731.3883.gasonics-pcs@snf.stanford.edu>

During unloading, wafer doen't jump over the bottom right holder bar. We need push the bar to unload wafer.



From eenriquez at snf.stanford.edu  Tue Nov 28 14:14:52 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 28 Nov 2006 14:14:52 -0800
Subject: Problem gasonics SNF 2006-11-27 19:04:31: Wafer unloading
Message-ID: <mailman.193.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cycled wafers with no problems.



From jrjain at snf.stanford.edu  Wed Nov 29 18:54:28 2006
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Wed, 29 Nov 2006 18:54:28 -0800
Subject: Problem gasonics SNF 2006-11-29 18:54:28: Sender arm
Message-ID: <mailman.194.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Sender arm scrapes against wafer backside when returning to rest position under sender cassette.



From eenriquez at snf.stanford.edu  Thu Nov 30 08:56:26 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 30 Nov 2006 08:56:26 -0800
Subject: Problem gasonics SNF 2006-11-29 18:54:28: Sender arm
Message-ID: <mailman.195.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Adjusted the wafer holder pin height.