Problem gasonics SNF 2006-10-17 18:27:30: transfer stopped
yoonjin at snf.stanford.edu
yoonjin at snf.stanford.edu
Tue Oct 17 18:27:31 PDT 2006
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Problem gasonics SNF 2006-10-13 01:35:28: shut down?
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Problem gasonics SNF 2006-10-17 18:27:30: transfer stopped
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Transfer arm droped the wafer inside and it stopped.
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Problem gasonics SNF 2006-10-17 18:27:30: transfer stopped
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