From emyers at snf.stanford.edu  Mon Sep 11 14:41:59 2006
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 11 Sep 2006 14:41:59 -0700
Subject: Problem gasonics SNF 2006-09-11 14:41:59: Many Wafer Pieces
Message-ID: <mailman.182.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Chamber needs to be vacuumed.  Many wafer pieces in chamber.



From cbaxter at snf.stanford.edu  Tue Sep 12 08:26:35 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 12 Sep 2006 08:26:35 -0700
Subject: Problem gasonics SNF 2006-09-11 14:41:59: Many Wafer Pieces
Message-ID: <mailman.183.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Vacuum broken wafer chips and verified wafer handling.