From barlian at snf.stanford.edu  Fri Apr  6 15:26:17 2007
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Fri, 6 Apr 2007 15:26:17 -0700
Subject: Problem gasonics SNF 2007-04-06 15:26:16: unload arm cannot acquire the wafer
Message-ID: <mailman.204.1356281731.3883.gasonics-pcs@snf.stanford.edu>

it displayed that message above after it finished stripping my first wafer... i didn't continue stripping the other wafers



From emyers at snf.stanford.edu  Fri Apr  6 16:48:10 2007
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 6 Apr 2007 16:48:10 -0700
Subject: Problem gasonics SNF 2007-04-06 15:26:16: unload arm cannot acquire the wafer
Message-ID: <mailman.205.1356281731.3883.gasonics-pcs@snf.stanford.edu>

No problem with training wafer.



From grahamab at snf.stanford.edu  Wed Apr 25 11:47:28 2007
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Wed, 25 Apr 2007 11:47:28 -0700
Subject: Shutdown gasonics SNF 2007-04-25 11:47:27: unexpected interrupt #4, wafer inside
Message-ID: <mailman.206.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Running recipe 017, gives error of "unexpected interrupt #4", says to hit stop to pause, enter to skip recipe but none of the buttons do anything.  wafer is still inside process chamber



From eenriquez at snf.stanford.edu  Wed Apr 25 12:06:31 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 25 Apr 2007 12:06:31 -0700
Subject: Shutdown gasonics SNF 2007-04-25 11:47:27: unexpected interrupt #4, wafer inside
Message-ID: <mailman.207.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Reset the system.  Ran 2 wafers with no problems



From vipin at snf.stanford.edu  Mon Apr 30 11:59:13 2007
From: vipin at snf.stanford.edu (vipin at snf.stanford.edu)
Date: Mon, 30 Apr 2007 11:59:13 -0700
Subject: Problem gasonics SNF 2007-04-30 11:59:13: Problem
Message-ID: <mailman.208.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Ran the test again....very bad result deposition rate 1/10 th of expected.



From vipin at snf.stanford.edu  Mon Apr 30 11:59:51 2007
From: vipin at snf.stanford.edu (vipin at snf.stanford.edu)
Date: Mon, 30 Apr 2007 11:59:51 -0700
Subject: Comment gasonics SNF 2007-04-30 11:59:50: Sorry ..error
Message-ID: <mailman.209.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Errr ignore the previous problem...my bad.....



From eenriquez at snf.stanford.edu  Mon Apr 30 14:09:56 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 30 Apr 2007 14:09:56 -0700
Subject: Comment gasonics SNF 2007-04-30 11:59:50: Sorry ..error
Message-ID: <mailman.210.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Apr 30 14:10:15 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 30 Apr 2007 14:10:15 -0700
Subject: Problem gasonics SNF 2007-04-30 11:59:13: Problem
Message-ID: <mailman.211.1356281731.3883.gasonics-pcs@snf.stanford.edu>

User error.