From sdogbe at snf.stanford.edu Wed Aug 1 04:35:27 2007 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Wed, 1 Aug 2007 04:35:27 -0700 Subject: Problem gasonics SNF 2007-08-01 04:35:26: Wafer in Chamber Message-ID: System not able to transport wafer from the chamber to the send cassette. Wafer still in the Chamber. From eenriquez at snf.stanford.edu Wed Aug 1 09:14:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Aug 2007 09:14:26 -0700 Subject: Problem gasonics SNF 2007-08-01 04:35:26: Wafer in Chamber Message-ID: Pressed the start button and the wafer unloaded. Cycled 5 wafers with no problems. From kimsora at snf.stanford.edu Thu Aug 2 09:15:07 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Thu, 2 Aug 2007 09:15:07 -0700 Subject: Problem gasonics SNF 2007-08-02 09:15:06: Gasonics is frozen! Message-ID: I got an error, and tried to restart my process. However, keys don't work. From eenriquez at snf.stanford.edu Thu Aug 2 10:51:23 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2007 10:51:23 -0700 Subject: Problem gasonics SNF 2007-08-02 09:15:06: Gasonics is frozen! Message-ID: Reset the system. Ran 3 dummy wafers. From fungus at snf.stanford.edu Tue Aug 7 23:08:26 2007 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Tue, 7 Aug 2007 23:08:26 -0700 Subject: Problem gasonics SNF 2007-08-07 23:08:26: not responding after error Message-ID: went into error mode and would not respond to resume or abort. From cbaxter at snf.stanford.edu Wed Aug 8 08:37:16 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 08:37:16 -0700 Subject: Problem gasonics SNF 2007-08-07 23:08:26: not responding after error Message-ID: The system locked up, checked 5vdc logic is down to 4.7vdc, adjusted up to 5.01vdc. From jrjain at snf.stanford.edu Fri Aug 17 13:19:07 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:19:07 -0700 Subject: Problem gasonics SNF 2007-08-17 13:19:07: Load arm Message-ID: Error: Load arm cannot acquire wafer From eenriquez at snf.stanford.edu Fri Aug 17 14:36:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 14:36:51 -0700 Subject: Comment gasonics SNF 2007-08-17 14:36:50: Update Message-ID: Loads is OK for wafers 1-14 only. Will adjust load arm on Monday. From fungus at snf.stanford.edu Tue Aug 21 14:32:34 2007 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:32:34 -0700 Subject: Problem gasonics SNF 2007-08-21 14:32:34: not responding stuck in error Message-ID: got stuck in an error and no longer responding to Resume or Abort. From cbaxter at snf.stanford.edu Tue Aug 21 16:26:08 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Aug 2007 16:26:08 -0700 Subject: Problem gasonics SNF 2007-08-21 14:32:34: not responding stuck in error Message-ID: Found nothing wrong with the tool.. From cbaxter at snf.stanford.edu Tue Aug 21 16:26:14 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Aug 2007 16:26:14 -0700 Subject: Problem gasonics SNF 2007-08-17 13:19:07: Load arm Message-ID: From mrobles at snf.stanford.edu Fri Aug 24 10:29:27 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 24 Aug 2007 10:29:27 -0700 Subject: Problem gasonics SNF 2007-08-24 10:29:24: Output Cassette full Error Message-ID: Received an error "Output Cassette Full". No wafers in output cassette. Cannot reset using Start or Stop. Tried reseating cassette and had same result. Have a wafer inside. From mrobles at snf.stanford.edu Fri Aug 24 10:30:05 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 24 Aug 2007 10:30:05 -0700 Subject: Shutdown gasonics SNF 2007-08-24 10:30:04: Output Cassette error Message-ID: Output Cassette error. Cannot reset. Wafer stuck in system. From eenriquez at snf.stanford.edu Fri Aug 24 14:17:02 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 14:17:02 -0700 Subject: Shutdown gasonics SNF 2007-08-24 10:30:04: Output Cassette error Message-ID: Error had already been cleared. Ran several wafers with no problems. From eenriquez at snf.stanford.edu Fri Aug 24 14:17:16 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 14:17:16 -0700 Subject: Problem gasonics SNF 2007-08-24 10:29:24: Output Cassette full Error Message-ID: Error had already been cleared. Ran several wafers with no problems. From eenriquez at snf.stanford.edu Fri Aug 24 14:19:23 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 14:19:23 -0700 Subject: Comment gasonics SNF 2007-08-24 14:19:23: Annual PM Message-ID: We will be performing the annual PM on Tuesday. From jrjain at snf.stanford.edu Tue Aug 28 12:22:21 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 28 Aug 2007 12:22:21 -0700 Subject: Problem gasonics SNF 2007-08-28 12:22:20: Load failure Message-ID: Load arm still fails to acquire wafers above slot 14. From eenriquez at snf.stanford.edu Tue Aug 28 13:03:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Aug 2007 13:03:31 -0700 Subject: Comment gasonics SNF 2007-08-24 14:19:23: Annual PM Message-ID: Rescheduled annual pm to Thrusday. From eenriquez at snf.stanford.edu Tue Aug 28 13:04:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Aug 2007 13:04:21 -0700 Subject: Comment gasonics SNF 2007-08-28 13:04:20: Annual PM rescheduled for Thursday Message-ID: From emyers at snf.stanford.edu Tue Aug 28 16:17:11 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 28 Aug 2007 16:17:11 -0700 Subject: Problem gasonics SNF 2007-08-28 12:22:20: Load failure Message-ID: This has been noted and there was an open comment saying to use only slots 1-14. From saurabhc at snf.stanford.edu Fri Aug 31 12:11:07 2007 From: saurabhc at snf.stanford.edu (saurabhc at snf.stanford.edu) Date: Fri, 31 Aug 2007 12:11:07 -0700 Subject: Shutdown gasonics SNF 2007-08-31 12:11:07: Wafer stuck inside Message-ID: I forgot to initialize the output cassette leading to output cassette full error. After that the console stopped responding to "Start" or "Stop". From eenriquez at snf.stanford.edu Fri Aug 31 14:32:19 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Aug 2007 14:32:19 -0700 Subject: Shutdown gasonics SNF 2007-08-31 12:11:07: Wafer stuck inside Message-ID: Reset the system.