Shutdown gasonics SNF 2007-08-31 12:11:07: Wafer stuck inside

saurabhc at snf.stanford.edu saurabhc at snf.stanford.edu
Fri Aug 31 12:11:07 PDT 2007


I forgot to initialize the output cassette leading to output cassette full error. After that the console stopped responding to "Start" or "Stop".




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